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Supermask Co. Ltd. was established in 1997 and is the first specialized manufacturer of high precision large area chrome photomasks by direct laser writing in China. It is engaged in the research, design and manufacture of all types of large area photomasks...

Introduction
SUPERMASK CO. LTD. was established in 1997 and is the first specialized manufacturer of high precision large area chrome photomasks by direct laser writing in China. It is engaged in the research, design and manufacture of all types of large area photomasks.

It is located in the south part of "the High-Tech Industrial Park" in Shenzhen city, which is named South-China Silicon valley because of its beautiful environment, nice weather and the area's manufacturing, education and technology base. It is also near to "Window of the world",the most famous sightseeing place in shenzhen.

SUPERMASK is a High-Tech industrial enterprise invested by the well-known HongKong industrialist, Mr.H.C. Tang, member of CPPCC. Mr.Nelson Yew,the chairman of the company,is a Chinese-American entrepreneur with extensive experience in advanced lithography from the Semiconductor and other related field. Both the engineering Research Center for Liquid Crystal Technology of Beijing Tsinghua University and China Science Academician Microelectronic research center are SUPERMASK's technology consultants. Mr.H.C. Tang has top concern about Chinese industrial and educational development at all time, and founded factories and schools in Xinjiang, Shanghai, Shenzhen, Dongguan and so on.??

The chrome mask for "LCD and IC lead frame" project was approved as a "high new technology project" by Shenzhen government in April 1998. The product was admitted in the first China High-tech Fair in Oct, 1999. SUPERMASK CO., LTD. had achieved the "Advanced Enterprise" approved by Shenzhen government in July, 2000.

All SUPERMASK staff regards quality and service as our company lifeline. SUPERMASK CO., LTD. obtained ISO9002 Certification issued by BSI quality system of England in April, 1999. It began to apply the "zero defect" management system developed by the American quality management master Mr. Crosby to daily production in May, 2000. Its yield statistics has already exceeded competitors located in U.S.A. and Taiwan. It has established a good reputation in the international market with customers, such as H.K Philips, H.K Varitronix, Japan Optrex, Korea Hyundai,etc.

Our products are widely used for manufacturing of liquid crystal display (LCD), integrated Circuit (IC) Packaging, EL display, PDP display,etc. We can supply photomask products to meet different precision, size and material requirements.

  • Chrome mask for TFT, color STN, STN and T;
  • Emulsion mask for STN and TN;
  • Chrome mask for EL and OLED;
  • Chrome and emulsion masks for PDP/VFD;
  • Chrome and emulsion mask for PCB, including SMT, BGA, HDI,etc.
  • Chrome mask for IC LEAD FRAME;
  • Chrome and emulsion masks used in IC Packaging Substrate;
  • Chrome mask for precision electronic components, such as, TAB, capacitor, resistor, and sensors;
  • Chrome mask applied to all kinds of encoders;

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Chrome Mask

Chrome mask, the key product of SUPERMASK CO.,LTD., has changed the situation that the high precision photomasks have to be imported from abroad. Our company can supply various photomask to meet different precision and size, which are mainly used in flat panel display, PCB, IC substrate, etc.

  • 300dpi and 400dpi PI sheet plates for LCD PI coating.

We firmly believe in TQM (total quality management) and TCS (total customer satisfaction) through best of creativity and total commitment by the entire staff of SUPERMASK.

Specifications (Standard Size: 400mmx400mm)
Accuracy / Class Grade 1 Grade 2 Grade 3 Grade 4
Min. Line Width / Space Width 2μm/2μm 7μm/7μm 20μm/20μm 40μm/40μm
Long Dimension Accuracy ±2.0μm ±3.0μm ±4.0μm ±20.0μm
Pattern Positioning Accuracy ±1.0μm ±2.0μm ±3.0μm ±20.0μm
Overlay Accuracy 1.0μm(3σ) 2μm(3σ) 4μm(3σ) 20μm(3σ)
Rectangularity  2μrad 2μrad 4μrad 8μrad
Dimension Accuracy Of Line ±0.5μm ±1.0μm ±2.0μm ±3.0μm
Uniformity of Space Width  0.2μm 0.3μm 0.5μm 1.0μm

Substrate
Material Sodalime Glass,quartz glass
Max.Size 600mm x 800mm
Normal Size 450mm x 550mm, 400mm x 400mm, 9"X9"
Thickness 3.0±0.2mm,4.8±0.2mm
Film Type Low Reflectance Chrome
Optical Density (λ=450nm) Between Plates 3.0±0.3     In Plate ±0.3
Reflectivity (λ=450nm) Between Plates 10±5%     In Plate ±2%

Defect
Type Grade 1 Grade 2 Grade 3 Grade 4
Area A None≥5μm None≥5μm None≥10μm None≥20μm
Area B None≥10μm None≥10μm None≥20μm None≥20μm
Area C None≥20μm None≥20μm None≥25μm None≥25μm
Area D None≥30μm None≥30μm None≥30μm None≥30μm

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Emulsion Mask
Emulsion mask is mainly used in medium- or low-precision LCD, PCB, IC substrate, etc.
Specifications (Standard Size: 400mmx400mm)
Min. Line Width / Space Width  50μm/50μm
Long Dimension Accuracy ±5.0μm
Pattern Positioning Accuracy  ±4.0μm
Overlay Accuracy  4μm(3σ)
Rectangularity  4.0μrad
Dimension Accuracy Of Line ±3.0μm
Deviation of Space Width  1μm

Substrate
Material Sodalime Glass
Max.Size 24"x32"
Normal Size 20"x24",18"x20" 16"x18"
Thickness 2.3mm,4.8mm
Film Type Emulsion
Optical Density (λ=450nm) Min. 3.6
Reflectivity (λ=450nm) -

Defect
Area B None≥20μm
Area C None≥30μm
Area D None≥40μm

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PI Sheet
PI sheet is mainly applied to the drum rumbling coating of LCD-TN, STN and TFT, that is to say, transferring PI fixing solution to ITO grass. Good dot depth and excellent dot uniformity offer by SUPERMASK company per customer's requirement guarantee uniform thickness of PI.
Specifications
Accuracy / Class Grade 1 Grade 2
Mesh/Dot Open Rate  400dpi/45% 300dpi/45%
Dot Angle / Dot Shape 45ƒ/circle 60ƒ/circle
Pattern Dimension Accuracy  ±0.085mm ±0.085mm
Back Thickness  1.50±0.15mm 1.50±0.15mm
Long Dimension Accuracy   ±1mm ±1mm

Substrate
Material Nylonflex 230/Cyrel230
Max. Size 750mmx750mm
Thickness  2.30mm or 2.84mm

Defect
Type Grade 1 Grade 2
Flaw None None
Dust Adherent None None
Mesh Condition Uniformity Uniformity

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Liquid Plate
The liquid photosensitive resin plate made by Qingyi is mainly used in PI coating for C-STN and TFTgrade LCD, PI coatings printed by the plate has more uniform thickness, generally speaking it is the best printing tools of PI coating made in China at present.
Materials Polybutadiene
Dimension Accuracy
Accuracy /Grade Grade1 Grade2
Dot density /open ratio 400dpi / 35-45% 300dpi / 30-50%
Dot angle /shape 75ƒ/circle 45ƒ/circle
Dimenion accuracy ±0.085mm ±0.085mm
Gross thinkness 2.24mm, 2.28mm, 2.84mm
Thickness of the base 1.4-1.7mm (2.24mm); 1.8-2.1mm (2.84mm)
The maxium size 650mm x550mm
Total size tolerance ±1mm ±1mm

Plaste Appearance
Control item Control critaria
External appearance defects Plate surface should be free from defects and dirt
Dot omission Omission:3 dots or less
Dot connection Connection:4 dots or less
Foreign matters Plate surface should be free from foreign matter
bubbles Bubbles should be 0.5mm or less from the plate surface,and there should be no abnomalities in dot
Stains and spots Plate surface should be free from stains and spots

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